What is MEMS?
MEMS stands for Micro-ElectroMechanical Systems. MEMS techniques allow both electronic circuits and mechanical devices to be manufactured on a silicon chip, similar to the process used for integrated circuits. This allows the construction of items such as sensor chips with built-in electronics that are a fraction of the size that was previously possible.
Four devices using MEMS technology have been commercially successful for several years.
MEMS accelerometer chips used to trigger airbags
MEMS mirror chips for use in projection screen TVs
MEMS inkjet nozzles used in printers
MEMS pressure sensors for medical applications
MEMS Products under Development
Several interesting new products and applications are being developed using MEMS.
MEMS - piezoelectric generator being developed for self contained wireless sensors
Computer game controller using MEMS accelerometer.
MEMS gyroscope with features that significantly lower the cost of integrating the gyroscope into industrial equipment.
MEMS microphones that are smaller and more resistant to heat than conventional microphones.
MEMS RF switches to reduce power losses in microwave applications.
MEMS Company Directory
|Piezoelectric generator that transforms vibrational energy into electricity
|Accelerometers and gyroscopes
|Accelerometer based motion sensors
|Custom products as well as blood pressure sensors for the medical field and air pressure sensors for the aircraft industry
|Custom products including mirror arrays for fiber optic switching, pressure and flow sensors for medical applications
|Custom products including accelerometers, pressure sensors, scanning mirror, and RF switches
|MEMS produced with CMOS production methods
MEMS Industry Group; a trade association for MEMS industries