MEMS: Micro-Electromechanical Systems

What is MEMS?

MEMS stands for Micro-ElectroMechanical Systems. MEMS techniques allow both electronic circuits and mechanical devices to be manufactured on a silicon chip, similar to the process used for integrated circuits. This allows the construction of items such as sensor chips with built-in electronics that are a fraction of the size that was previously possible. 

MEMS Products

Four devices using MEMS technology have been commercially successful for several years.

MEMS Products under Development

Several interesting new products and applications are being developed using MEMS.

MEMS Company Directory

Company MEMS Products
MicroGen Systems Piezoelectric generator that transforms vibrational energy into electricity
Analog Devices Accelerometers and gyroscopes
STMicroelectronics Accelerometer based motion sensors
MEMSCAP Custom products as well as blood pressure sensors for the medical field and air pressure sensors for the aircraft industry
Silex Microsystems Custom products including mirror arrays for fiber optic switching, pressure and flow sensors for medical applications
Tronics Microsystems Custom products including accelerometers, pressure sensors, scanning mirror, and  RF switches
SiTime Oscillators
Debiotech Insulin pump
Baolab MEMS produced with CMOS production methods

MEMS Resources

MEMS at Sandia National Laboratory

MEMS Industry Group; a trade association for MEMS industries

National Science Foundation Research Center for Microsensors and Microactuators

Center for MEMS and Micosystems Technology

Laboratory for Integrated Micro Mechatronic Systems (LIMMS)


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