MEMS: Micro-Electromechanical Systems

What is MEMS?

MEMS stands for Micro-ElectroMechanical Systems. MEMS techniques allow both electronic circuits and mechanical devices to be manufactured on a silicon chip, similar to the process used for integrated circuits. This allows the construction of items such sensor chips with built-in electronics that are a fraction of the size that was previously possible. The photo below shows an optical displacement sensor built with MEMS that can be used as an accelerometer.

Photo courtesy of Sandia National Laboratories, SUMMiT^TM Technologyies, www.mems.sandia.gov

MEMS Products

Four devices using MEMS technology have been commercially successful for several years. These are:

MEMS accelerometer chips used to trigger airbags
MEMS mirror chips for use in projection screen TVs
MEMS inkjet nozzles used in printers
MEMS pressure sensors for medical applications

MEMS Products under Development

Check out some interesting new products and applications being developed using MEMS:

Computer game controller using MEMS accelerometer.
Programmable MEMS gyroscope with features that significantly lower the cost of integrating the gyroscope into industrial equipment.
MEMS microphones that are smaller and more resistant to heat than conventional microphones.
MEMS RF switches to reduce power losses in microwave applications.
MEMS blood pressure sensor with wireless data transfer that can be implanted in patients.
MEMS oscillators that are smaller and more integrated with electronics circuits than current quartz oscillators.

MEMS Company Directory

Company	MEMS Products
Analog Devices	Accelerometers and gyroscopes
STMicroelectronics	Accelerometer based motion sensors
MEMSCAP	Custom products as well as blood pressure sensors for the medical field and air pressure sensors for the aircraft industry
Silex Microsystems	Custom products including mirror arrays for fiber optic switching, pressure and flow sensors for medical applications
Tronics Microsystems	Custom products including accelerometers, pressure sensors, scaning mirror, and RF switches
SiTime	Oscillators
Discera	Oscillators
Debiotech	Insulin pump

MEMS Resources

MEMS at Sandia National Laboratory

MEMS and Nanotechnology Clearinghouse

MEMS Industry Group; a trade association for MEMS industries

National Science Foundation Research Center for Microsensors and Microactuators

Center for MEMS and Micosystems Technology

Laboratory for Integrated Micro Mechatronic Systems (LIMMS)